Cu rrent SPECIFICATION S
Cu rrent
RANGE
1
Max.
VOLTAGE
MEASURE SOURCE
Res oluti on
3
Accuracy
±(% rdg + amps) Res oluti on
3
Accuracy
±(% rdg + amps)
4210-
SMU
2
High
Power
SMU
1 A 21 V 1 μA 0.100% + 200 μA 50 μA 0.100% + 350 μA
100 mA 210 V 100 nA 0.045% + 3 μA 5 μA 0.050% + 15 μA
4200-
SMU
2
Medium
Power
SMU
100 mA 21 V 100 nA 0.045% + 3 μA 5 μA 0.050% + 15 μA
10 mA 210 V 10 nA 0.037% + 300 nA 500 nA 0.042% + 1.5 μA
1 mA 210 V 1 nA 0.035% + 30 nA 50 nA 0.040% + 150 nA
100 μA 210 V 100 pA 0.033% + 3 nA 5 nA 0.038% + 15 nA
10 μA 210 V 10 pA 0.050% + 600 pA 500 pA 0.060% + 1.5 nA
1 μA 210 V 1 pA 0.050% + 100 pA 50 pA 0.060% + 200 pA
100 nA 210 V 100 fA 0.050% + 30 pA 5 pA 0.060% + 30 pA
4200-SMU and
4210-SMU with
optional
4200-PA PreAmp
10 nA 210 V 10 fA 0.050% + 1 pA 500 fA 0.060% + 3 pA
1 nA 210 V 3 fA 0.050% + 100 fA 50 fA 0.060% + 300 fA
100 pA 210 V 1 fA 0.100% + 30 fA 15 fA 0.100% + 80 fA
10 pA 210 V 0.3 fA 0.500% + 15 fA 5 fA 0.500% + 50 fA
1 pA 210 V 100 aA 1.000% + 10 fA 1.5 fA 1.000% + 40 fA
Voltage Compliance:
Bipolar limits set with a single value between full scale and 10% of selected voltage range.
Volta ge SPECIFICATION S
Volta ge
RANGE
1
Max.
Cu rrent MEASURE SOURCE
4200-SMU 4210-SMU Resolution
3
Accuracy
±(% rdg + volts) Resolution
3
Accuracy
±(% rdg + volts)
200 V
4 10.5 mA 105 mA 200 μV 0.015% + 3 mV 5 mV 0.02% + 15 mV
20 V 105 mA 1.05 A 20 μV 0.01 % + 1 mV 500 μV 0.02% + 1.5 mV
2 V 105 mA 1.05 A 2 μV 0.012% + 150 μV 50 μV 0.02% + 300 μV
200 mV 105 mA 1.05 A 1 μV 0.012% + 100 μV 5 μV 0.02% + 150 μV
Spe cificati on Conditi ons
Specifications are the performance standards against
which the Models 4200-SMU, 4210-SMU, and 4200-PA
are tested. The measurement and source accuracy are
specified at the termination
of the supplied
cables.
• 23°C ±5°C, within 1 year of calibration, RH
between 5% and 60%, after 30 minutes of warm-up.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
Supplemental information is not warranted but provides useful information
about the Models 4200-SMU, 4210-SMU, and 4200-PA.
Compliance Acc uracy:
Voltage compliance equals the voltage source specifications.
Current compliance equals the current source specifications.
Overshoot:
<0.1% typical.
Voltage:
Full scale step, resistive load, and 10mA range.
Current:
1mA step, RL = 10kΩ, 20V range.
Range Change Transient:
Voltage Ranging:
<200mV.
Current Ranging:
<200mV.
Acc uracy Specifications:
Accuracy specifications are multiplied by one of
the following factors, depending upon the ambient temperature and humidity.
% R elative Humidity
Temperature 5–60 60–80
10°–18°C
×3 ×3
18°–28°C
×1 ×3
28°–40°C
×3 ×5
Remote Sense:
<10Ω in series with FORCE terminal not to exceed a 5V difference
between FORCE and SENSE terminals. ±30V maximum between
COMMON and SENSE LO.
Maximum load Capacitance:
10nF.
Maximum GUAR D Offset Voltage:
3mV from FORCE.
GUAR D Output Impedance:
100kΩ.
Maximum GUAR D Capacitance:
1500pF.
Maximum shield Capacitance:
3300pF.
4200-SMU and 4210-SMU S hunt resistance (FOR CE to COMMON ):
>10
12Ω (100nA–1μA ranges).
4200-PA S hunt resistance (FOR CE to COMMON ):
>1016Ω (1pA and
10pA ranges), >10
13Ω (100pA–100nA ranges).
Output Terminal Connection:
Dual triaxial connectors
for 4200-PA,
dual mini-triaxial connectors for 4200-SMU and 4210-SMU.
Noise Characteristics (typical):
Voltage Source (rms):
0.01% of output range.
Current Source (rms):
0.1% of output range.
Voltage Measure (p-p):
0.02% of measurement range.
Current Measure (p-p):
0.2% of measurement range.
Maximum Slew Rate:
0.2V/μs.
